扫描电子显微镜及X射线能谱仪的原理与维护

Principles and maintenance of scanning electron microscope and X-ray energy spectrometer

扫描电子显微镜结合X射线能谱仪在化学、物理、材料学、生物、医学等领域的应用中，具有非常重要的地位。本文主要介绍了扫描电子显微镜及X射线能谱仪的工作原理、结构特点，并对仪器的维护与使用方面进行了一定的介绍，与广大同行进行探讨。

Scanning electron microscope and X-ray energy spectrometer are widely used in many research areas, such as chemistry, physics, material, biology and medicine, etc. The principles and maintenance of scanning electron microscope and X-ray energy spectrometer are discussed in this paper. Moreover, the maintenance and application are also discussed.