近场微波显微镜对石墨烯的无损检测研究

Research on Nondestructive Measurement of Graphene Films Based on NSMM

本文基于近场扫描微波显微镜的基本原理,搭建了一套高效测量石墨烯薄膜材料电磁特性的系统。近场扫描微波显微镜是利用探针靠近样品时,记录谐振腔的品质因数或谐振频率的偏移量,然后通过软件仿真探针样品模型的方法得到样品的介电常数、电导率等物理量,以非接触的方式无损表征了石墨烯薄膜的材料特性。

We build up a near-field scanning microwave microscope（NSMM）which can test the properties of thin film.By detecting the Q factor of resonant cavity and the offset of the resonant frequency when probe is close to samples,physical characteristics including dielectric constant and electrical conductivityof samples can be obtained effectively with software-simulating.Material properties of graphene films were characterized by non-contact test method.