微波频率与功率对微波等离子体参数的影响

Effects of Microwave Frequency and Microwave Power on Plasma Parameters

本文研究了微波功率和微波频率对等离子体参数,如电子密度、电子温度、气体温度以及火焰长度的影响。对等离子体的多物理场数值仿真是在基于有限元法的COMSOL Multiphysics中进行的。计算结果显示,等离子体电子密度、电子温度、气体温度都会随着输入微波功率的增大而增大;2450 MHz的微波等离子体相比于915 MHz的微波等离子体,具有更好的性能。同时,本文对不同输入功率下等离子体火焰长度进行了实验测量,结果显示输入功率对火焰长度仅有很微弱的影响。

This paper introduces the effects of microwave frequency and microwave power on the plasma parameters,such as electron density,electron temperature,gas temperature and flame length.The numerical multiphysics simulation is operated by COMSOL Multiphysics which is based on finite element method（FEM）.The calculation results show that the electron density,the electron temperature and the gas temperature increase with the increasing of microwave input power,and the plasma generated by the microwave of 2450 MHz has better performance than that by 915 MHz.Plasma flame lengths with different input power are measured and the results show that the input power has little effect on flame length.