平面线圈型直线时栅参数优化方法

Parametric Optimization of Planar-Coil Linear Timing-Grating

提出一种采用非线性规划遗传算法对平面线圈型直线时栅位移传感器结构参数进行优化的方法,以解决传感器感应电动势谐波成分较多、用枚举法优化传感器参数费时且效果有限等问题。通过建立基于非线性规划遗传算法的数学模型对传感器参数进行优化,根据优化结果建立传感器的物理模型进行仿真,设计传感器进行实验,与枚举法的优化结果进行比较。结果表明:优化效率提高了65%,感应信号谐波畸变率降低了10倍,在240 mm的量程内传感器测量精度从±1μm提高到了±0.8μm。说明利用该方法对传感器结构参数进行优化是可行的,根据优化结果设计的传感器从结构上抑制了原始误差,实现了高精度测量。

A method to optimize the structural parameters of the plane-coil linear time-grating displacement sensor based on nonlinear programming genetic algorithm is proposed,which is used to reduce harmonic components of induced electromotive force,improve efficiency and effectiveness comparing with the enumeration method. The parameters of sensor are optimized by nonlinear programming genetic algorithm. The physical model of sensor which is based on the optimized parameters is established and simulated. The prototype is designed and experimented. Results show that the efficiency is enhanced by 65% and the total harmonic distortion is reduced by 10 times,comparing with experimental results using enumeration method. Meanwhile, the measurementaccuracy of sensor increases from ± 1 μm to ± 0. 8 μm during the range of 240 mm. This paper shows that the method for parameters optimization of planar-coil linear timing-grating is feasible. The sensor with optimization parameters suppresses the original error in structure,and the high precision measurement is realized.