摘要
碳酰氟是一种环保性能优良、最具潜力的半导体设备清洗和蚀刻材料。作为电子气体的新宠,其制备方法、反应设备、纯化技术、应用研究等被业界广泛关注。
Carbonyl fluorine is a kind of excellent environmental performance,the most promising semiconductor equipment cleaning and etching materials. As electronic gas to be bestowed favor on newly,the preparation methods,reaction equipment,purification technology and application research has been widely concerned.
作者
柴华
李峰
赵新堂
王民涛
CHAI Hua, LI Feng, ZHAO Xintang, WANG Mintao [ Sinochem Modem Environmental Chemical(Xi'an) Co. ,Ltd. ,Xi'an 710201 ,China)
出处
《低温与特气》
CAS
2018年第1期4-9,共6页
Low Temperature and Specialty Gases
关键词
碳酰氟
制备技术
反应设备
纯化技术
应用研究
专利分析
carbonyl fluorine
preparation technology
response equipment
purification technology
application research
patent analysis