碳酰氟研究的最新进展

Resent Progress in the Study of Carbonyl Fluoride

碳酰氟是一种环保性能优良、最具潜力的半导体设备清洗和蚀刻材料。作为电子气体的新宠,其制备方法、反应设备、纯化技术、应用研究等被业界广泛关注。

Carbonyl fluorine is a kind of excellent environmental performance,the most promising semiconductor equipment cleaning and etching materials. As electronic gas to be bestowed favor on newly,the preparation methods,reaction equipment,purification technology and application research has been widely concerned.