大口径非球面元件磨削轮廓测量技术研究进展

Research Progress of Measurement Technology for Large-Diameter Aspheric Elements on Grinding Stage

大口径非球面光学元件具有优越的光学特性,在激光聚变、空间技术和大型光学望远镜等领域有着越来越广泛的应用。然而大口径非球面元件的大批量生产需要高精度和高效率的数控磨削、抛光技术,同时超精密大中型非球面光学元件大批量制造所面临的巨大挑战推动了现代光学测量技术朝着更高的效率、更高的精度和更高的自动化水平方向发展。根据非球面光学元件的加工工艺,系统总结了磨削阶段测量技术的研究现状,并详细说明了以上技术的原理,最后展望了大口径非球面元件磨削阶段测量技术的发展趋势。

Large-diameter aspheric optical elements have superior optical properties, and they widely applied in the areas such as laser fusion, space technology and large optical telescopes are more and more However, the mass production of large-diameter aspheric elements requires high-precision and high-efficiency numerical control grinding and polishing techniques. Meanwhile, the enormous challenges of mass production of ultra-precision medium and large aspheric optical elements have propelled the modern optical measurement technology toward higher efficiency, higher accuracy and higher level of automation. According to the processing technology of aspheric optical elements, the research status of measurement technology in grinding stage is summarized systematically, and the principles of the above technologies are explained in detail. At last, the development trend of the measurement technology Of large aspheric optical elements in grinding stage is prospected.