摘要
为了研究不同制备工艺对电极欧姆接触特性的影响,分别采用真空蒸发法、溅射法及化学沉积法在CdZnTe晶片表面制备了Au薄膜电极,通过测试样品的SEM、I-V曲线及交流阻抗谱,研究了不同电极制备工艺及退火处理对Au薄膜电极的微观结构及欧姆接触特性的影响。结果表明化学沉积法制备的Au薄膜表面更加平整、致密,接触势垒的高度较低,电极欧姆接触特性最好。退火处理可以改善电极的欧姆接触特性,100℃退火后,化学沉积法制备的Au电极的欧姆系数由0.883提高至0.915,势垒高度由0.492降低至0.487 e V。交流阻抗谱分析表明,化学沉积法制备电极具有最低的接触势垒,这与界面处晶片表面的掺杂及缺陷的变化有关。
Tellurium cadmium zinc(CdZnTe) is a kind of II-VI wide band-gap semiconductor compound,which is a promising material to fabricate the X-or γ-ray detectors.Its Ohmic contact property significantly influences the detector performance.In order to study the influence of preparation technology on Ohmic contact properties of the electrode,Au film electrodes were deposited by sputtering deposition,vacuum evaporation and electroless deposition.By analyzing I-V curves,SEM and AC impedance spectra,microstructure and Ohmic contact properties of the samples were studied.The results show that surtace of the sample prepared by the electroless deposition is smooth and dense showing lower contact barrier and better Ohmic contact properties smooth and Ohmic contact properties of the electrodes.After annealing at 100℃,the Ohmic coefficient of the Au electrode prepared by electroless deposition increases from 0.883 to 0.915,and the barrier height reduces from 0.492 e V to 0.487 e V,displaying improved.AC impedance spectroscopy shows that it is the change of impurity-doping and defects of CdZnTe surface at the interface that attribute to the lowest contact barrier of the Au electrode prepared by electroless deposition.
作者
谢经辉
刘雨从
王超
殷子薇
陈嘉栋
邓惠勇
沈悦
王林军
张建国
戴宁
XIE Jing-Hui1,2, LIU Yu-Cong2, WANG Chao2, YIN Zi-Wei2, CHEN Jia-Dong2,3, DENG Hui-Yong2, SHEN Yue1, WANG Lin-Jun1, ZHANG Jian-Guo2, DAI Ning2(1. School of Materials Science and Engineering, Shanghai University, Shanghai 200444, China; 2. Shanghai Institute of Tech- nical Physics, Chinese Academy of Science, Shanghai 200083, China; 3. Changzhou Institute of Photoelectric Technology, Shanghai Institute of Technical Physics, Chinese Academy of Science, Changzhou 213000, Chin)
出处
《无机材料学报》
SCIE
EI
CAS
CSCD
北大核心
2018年第3期273-278,共6页
Journal of Inorganic Materials
基金
国家自然科学基金(61290304
2012CB619200)
科技部重大研发计划(2016YFB0402405
2016YFA0202201)
上海市科委基金(16ZR1441200
15520500200)
中国科学院前沿重点项目(QYZDJ-SSW-SLH018)~~