金属过渡层类型对非晶碳膜结构性能的影响

Metal Buffer Layer on Structure,Mechanical and Tribological Property of GLC films

采用直流磁控溅射技术制备不同金属过渡层(Cr,Ti,W)的类石墨非晶碳膜(GLC),研究过渡层类型对非晶碳膜微结构的影响,并考察其在人工海水中摩擦性能的变化。研究结果表明:Cr/GLC薄膜sp2杂化键含量最高,沿GLC表面到铬碳界面方向,sp2杂化键含量逐渐增大,Ti过渡层和W过渡层的sp2杂化键含量变化不明显。Cr/GLC薄膜较高的sp2杂化键含量有助于其在摩擦过程中产生可以充当润滑相的石墨化转化摩擦转移膜。在三种涂层中,Cr/GLC薄膜表现出最高的腐蚀电位–0.16 V和最低的腐蚀电流密度4.42?10–9 A/cm2。因此相较于Ti,W作过渡层的GLC薄膜,Cr/GLC薄膜在海水环境下表现出优异的摩擦学特性。

Graphite-like carbon films（GLC） with different metal buffer layers（Cr,Ti,W） were fabricated by direct current magnetron sputtering technique.The effect of metal buffer layer on structure and tribological properties in artificial seawater were carefully investigated.The results show that,in contrast to Ti/GLC and W/GLC film,Cr/GLC film has the highest sp2 hybridization content,which increases from the top layer to Cr/C interface.The highest sp2 hybridization content promotes graphitization degree of the tribo-film which acts as lubrication phase in the sliding process.The results of potentiodynamic polarization tests show that,in all of three GLC films,Cr/GLC film shows superior corrosion resistance with the highest corrosion voltage（Ecorr） of –0.16 V and the lowest corrosion current（icorr） of 4.42×10–9 A/cm2.As a result,Cr/GLC film presents the best tribological properties in artificial seawater in contrast to Ti/GLC and W/GLC films.