多晶硅副产物综合处理研究进展

Progress in Comprehensive Treatment of Polysilicon By-products

在多晶硅生产中,会副产大量的副产物,主要包括渣浆和高沸物。国内处理渣浆一般采用过滤或蒸发的方式,回收有价值的氯硅烷。针对高沸物,由于其结构复杂,成分不确定且难以通过简单的分离实现综合利用,一般通过水解等方式进行回收和利用。本文综和介绍了国内外高沸点聚合物处理方式,并探讨了新的高沸点聚合物处理方式。

In polysilicon production, a large number of byproducts will be by-produced, mainly including slurry and high boilers. Domestic treatment of the slurry is generally filtered or evaporated, the recovery of valuable chlorosilane. For high-boiling, because of its complex structure, composition is uncertain and difficult to achieve a comprehensive utilization of simple separation, generally by way of recovery and utilization of hydrolysis.This article summarizes the domestic and foreign high boiling point polymer processing methods, and discusses the new high boiling point polymer processing methods.