半导体激光自混合干涉加速度计测试技术研究

Semiconductor laser self-mixing interferometric accelerometer testing research

提出了一种基于激光自混合干涉的加速度计测试技术。自混合干涉系统的外腔反射靶面和待测加速度计均固定于一个激振器振动端。根据不同的振动频率,分别采用条纹计数法或贝塞尔零值法从自混合干涉信号中解调加速度信息。对商用加速度计多组测试结果表明,利用该装置测得的加速度计灵敏度在同一频率下保持相对恒定的值,其灵敏度最大波动范围不超过0.02mv/（m/s^2）。该测试系统具有结构简单紧凑,成本低等特点,在工业上有一定的应用前景。

The paper proposed an accelerometer testing technique based on laser self-mixing interferometer（ SMI）. The external target of the SMI and the accelerometer under test are both fixed on a vibration exciter. Fringe counting method or Bessel function zero method are used to extract acceleration from the SMI signal according to the different vibration frequency. Several tests with a commercial accelerometer show that sensitivity of the accelerometer measured by the proposed system maintains a relatively constant value at the same frequency,and its maximum fluctuation range does not exceed 0. 02 mv/（ m/s^2）. Due to the advantages of simple structure and cost-effective,the proposed method has some potential in industrial application.