环形、矩形及I2形MEMS原子力显微镜探针的力灵敏度（英文）

Force Sensitivityof MEMS-Based Ring,Rectangle and I2 Shaped AFM Probes

基于微电子机械系统（MEMS）技术的环形、矩形以及I2形谐振器由于具有较高的谐振频率与品质因数等优点,可作为原子力显微镜（AFM）探针用于物理表面高速成像实验。在结构尺寸近似的情况下,对影响上述三种MEMS探针性能的谐振频率、有效刚度以及品质因数等关键指标进行综合分析与比较。在此基础上,对上述MEMS探针的力灵敏度进行了评估。结果表明,环形MEMS探针适用于对柔性物体的高精度成像,而I2形MEMS探针则更适合于对大范围区域的高速实时成像。通过对机械结构与检测电路的进一步优化,MEMS探针的力灵敏度有望达到并超越现有悬臂式探针的水平。

The micro-electromechanical system（MEMS）based ring,rectangle and I2 shaped resonators have shown great potential to be used as the atomic force microscope（AFM）probes for the physical surface high-speed imaging experiment due to their advantages of high resonance frequency and high quality factor.The key indexes affecting the performances of the three MEMS probes i.e.resonance frequency,effective stiffness and quality factor were analyzed and compared synthetically with the similar structure dimensions.Based on the above results,the force sensitivity for these MEMS probes was evaluated.And the results show that the ring shaped MEMS probe is fit for high precision imaging of the flexible object,while the I2 shaped MEMS probe is fit for high speed real time imaging in a wide range.Through the optimization of the mechanical structure and detection circuit,the force sensitivity of the MEMS probe is expected to reach and surpass that of the current cantilever probe.