铝表面磁控溅射沉积ZrN薄膜色度的研究

Study on Chrominance of Zr N Films Deposited by Magnetron Sputtering on Aluminum Surface

使用磁控溅射技术,在铝外表沉积ZrN薄膜,研究了磁控溅射时间和氮气流量对ZrN薄膜色度的影响。结果表明：随着磁控溅射时间的增长,薄膜的亮度L在减少,b^＊值（黄蓝值）在3min时出现了最大值,说明镀膜时间在3min时最接近黄色,a^＊值（红绿值）波动比较大。对比仿金膜的L、a^＊、b^＊值（CIE1976L、a^＊、b^＊系统已为世界各国正式采纳,作为国际通用的测色标准,它适用于一切光源或物体色的表示与计算）,在3min左右时,薄膜颜色最接近金黄色;而氮气流量在13～18sccm内,薄膜颜色呈金黄色。因此对于铝的溅射参数为：溅射时间3min,氮气流量15sccm。

The effects of magnetron sputtering time and nitrogen flow rate on the chromaticity of ZrN films were studied by depositing ZrN films on the surface of aluminum using magnetron sputtering technology. The results show that, with the increase of magnetron sputtering time, the brightness L of the film decreases, the value of b^＊ （yellow-blue value） reaches the maximum at 3 min, which indicate that when the coating time is 3 min, the film color is the closest to yellow, and the fluctuation of the value of a^＊ （red-green value） is relatively large. Compared with the L, a^＊, b^＊ values of copy gold film （the CIE1976 L, a^＊, b^＊ system has been formally adopted by all countries worldwide. As an international standard for color measurement, it is applicable to the representation and calculation of all light or object colors）, under sputtering time of 3 min, the film color is the closest to golden yellow. While the nitrogen flow rate is within the range of 13-18 sccm, the color of the film is golden yellow. Therefore, the sputtering parameters for the aluminum are sputtering time： 3 min, nitrogen flow rate： 15 seem.