摘要
根据步进投影光刻机的基本原理及其基本结构,分析了影响投影光刻工艺的主要因素。根据多年对设备的维修经验,总结了ASML步进投影光刻机的常见故障并给出了相应的解决方法。
This paper introduces the basic principle of the stepper projection lithography and its basic structure,analyzing the main factors influenced the lithography process. According to the experience in maintenance,summarizes the stepper projection lithography common faults,and gives the corresponding solutions.
作者
雷宇
LEI Yu(The 13th Research Institute of CETC, Shijiazhuang 050051, China)
出处
《电子工业专用设备》
2018年第2期40-45,共6页
Equipment for Electronic Products Manufacturing
关键词
曝光
预对准
调平调焦
同轴对准
Exposure
Pre-alignment
Level sensor
TTL（Through the Lens）alignment
