扩散退火一体化上下料机构设计

The Structure Design of Diffusion Annealing Integrated Loading and Unloading Machine

通过介绍石英舟载体的独特性,提出了其上下料机的设计要点,介绍了该上下料机的技术参数和工艺流程,详细分析了设备的各部分结构设计,说明了设备的相关配套功能。

By introducing the uniqueness of quartz boat,the key points of the design are put forward for its loading and unloading machine,introducing the technical parameters and the technological process of the loading and unloading machine,detailed analyzing the structural design of each part of the equipment,the related supporting functions of the equipment are explained.