Al_2O_3粉体与真空电子陶瓷

Aluminum Oxide Powder and Vacuum Electronic Ceramics

真空电子器件是电子工业器件中最重要的器件之一,其主要的部件之一是绝缘外壳。外壳的共同要求是真空气密性好、机械强度高、绝缘性能优良等。某些器件(例如真空开关管)还要求真空器件寿命保证20年之久。目前国内外真空开关管绝缘外壳大多采用95%Al_2O_3陶瓷与活性Mo-Mn法封接工艺,产品质量上国内不如国外的,国内产品只应用于低端市场。本人对真空开关管绝缘外壳进行了比较系统的研究分析,提出了我国Al_2O_3粉体和高Al_2O_3陶瓷的不足之处和相应的改进措施。

The vacuum electronic device is one of most important devices in electronic industy.It must be good vacuum density,fine mechanical strength,and excellent insulation property etc.Sometimes also require 20 years of life.（For example,vaecum switch tube）.Now the high aluminum oxide ceramics and active Mo-Mn process have been used almost all over the world.The products made in China have some defects.In this paper,the causes of defects are systematically studied and analyed and the corresponding improvement measures are put forward.