浅析用平面平晶检定仪器的平面度

Analysis of Instrument's Flatness Verification with Optical Flat

本文以千分尺为对象,分析用平面平晶检定仪器平面度的方法和基本原理,以干涉带的形状来判断仪器的平面度。同时还分析了用平面平晶在检定千分尺平面度过程中的影响因素,并对其测量不确定度进行了评估。

Taking micrometer as an example,this paper analyzes the method and basic principle of flatness verification with optical flat,and determines the flatness of the instrument with the shape of the interference band. At the same time,the influence factors are also analyzed,and the uncertainty of the measurement is evaluated.