摘要
通过严格耦合波分析方法考察了宽带偏振无关多齿谐振光栅反射镜的工艺容差性。理论分析显示,在1.62~1.76μm波段范围内,当微纳谐振光栅的周期和厚度、调制形状、中间层厚度及缓冲层厚度等关键结构参数变化20nm时,其对器件反射谱的影响几乎可以忽略不计。该结果表明此结构在现有工艺误差范围内表现出比较好的工艺容差性,从而有利于该器件的加工制备。
By using rigorous coupled-wave analysis method, the process tolerance of broadband polarization independent reflector with multi-subpart profile resonant grating is investigated. The theoretical analysis shows that, in the wavelength range of 1.62-1.76 μm, the change of 20 nm of critical structural parameters such as period and thickness, modulation profile, middle layer thickness, buffer thickness of micro-nano resonant grating has a negligible effect on the reflectance spectrum of the device. The results show that the proposed reflector has good processing tolerance in the existing processing error range, which is conducive to the processing and fabrication of the device.
作者
吴华明
肖文波
肖永生
黄丽贞
段军红
徐欢欢
刘宪爽
傅建平
Wu Huaming;Xiao Wenbo;Xiao Yongsheng;Huang Lizhen;Duan Junhong;Xu HuanhuanL;Liu Xianshuang;Fu Jianping(National Engineering Laboratory for Non-Destructive Testing and Optoelectronic Sensing Technology and Applications Key Laboratory of Non-Destructive Testing, Ministry of Education, Nanchang, Jiangxi 330063, China;Jiangwi Engineering Laboratory for Optoelectronics Testing Technology, School of Measuring and Optical Engineering Nanchang Hangkong University, Nanchang, Jiangxi 330063, China;School of Information Engineering, Nanchang Hangkong University, Nanchang, Jiangxi 330063, China)
出处
《激光与光电子学进展》
CSCD
北大核心
2018年第4期229-234,共6页
Laser & Optoelectronics Progress
基金
国家自然科学基金(11264031)
江西省青年科学基金重大项目(20143ACB21011)
航空科学基金(20162856004)
无损检测技术教育部重点实验室基金(ZD201629004)
江西省自然科学基金(20151BAB207054
20114BAB201019)
南昌航空大学研究生创新专项基金(YC2017051)
关键词
集成光学
偏振无关反射镜
亚波长多齿光栅
结构参数分析
integrated optics
polarization independent reflector
subwavelength multi-subpart profile grating
structural parameter analysis
