248nm准分子激光辅助微铣削加工有机玻璃表面微通道实验研究

Experimental Study on Micro Channel Processing of Assisted Micro Milling of Polymethyl Methacrylate Surface with 248nm Excimer Laser

采用248 nm的Kr F准分子激光器对有机玻璃PMMA进行表面微通道的辅助微铣削实验。利用自行研制的实验装置,通过分析铣削过程,研究了激光工艺参数及微铣削工艺参数对铣削微通道底面质量的影响。以微通道沟槽表面粗糙度为质量指标,设计了正交试验方案,用极差和方差分析法比较了各工艺参数对微通道底面粗糙度的影响规律,得到了最优工艺参数组合。结果表明:铣削参数对微通道底面粗糙度的影响明显强于激光参数;基于优化的工艺参数组合加工的有机玻璃微通道底面粗糙度可达Ra50 nm左右,且边缘整洁、通道宽度均匀。

Assisted micro milling experiments of surface microchannels on PMMA by Kr F excimer laser at wavelength of 248 nm. The influence of laser process parameters and micro-milling process parameters on the quality of milling microchannel bottom surface was analyzed by using the self-developed experimental apparatus. Taking the surface roughness of microchannel as the quality index,the orthogonal experimental scheme was designed. The influence of process parameter on the roughness of the bottom surface of the microchannel was compared with the variance and dissimilarity analysis,and the optimal process parameters were obtained. The results show that the effect of milling parameters on the roughness of the bottom surface of the microchannel is stronger than that of the laser parameters. Based on the optimized combination of process parameters,the bottom surface of processed polymethyl methacrylate microchannels can reach a roughness of about Ra50 nm,the edge is clean and the width of the channels is uniform.