摘要
线宽压窄模块是光刻用准分子激光器的重要组成部分。线宽压窄模块中棱镜组及光栅的装配角度直接影响系统输出特性。为了进一步改进准分子激光器线宽压窄模块工程化安装与调试工艺,研究了棱镜扩束器中棱镜角度偏差对系统线宽及能量的影响。通过理论推导及实验验证,分析了单个棱镜角度偏转对准分子激光系统线宽及能量的影响,确定了每个棱镜的装调误差;实验结果与理论分析结果基本符合。根据确定的装调误差优化设计线宽压窄模块的装调方法,对模块的光谱控制工程化具有一定的指导意义。
Linewidth narrowing module is an important component of excimer laser for lithography.The installation angles of prisms and gratings affect the system output characteristics directly.In order to improve installation and debugging technique of linewidth narrowing module,we study the influence of the angle deviation of the prism in the prism expander on the energy and linewidth of the system.Through the theoretical derivation and experimental verification,we analyze the influence of individual prism angle deflection on the energy and linewidth of the excimer laser system,and determine the alignment error of each prism.The experimental results are in good agreement with the theoretical analysis results.The alignment method for optimizing the linewidth narrowing module design according to the alignment error has guiding significance for the spectrum control engineering.
作者
王倩
赵江山
周翊
Wang Qian;Zhao Jiangshan;Zhou Yi(Academy of Opto-Electronics, Chinese Academy of Sciences, Beijing 100094, China;Beijing Excimer Laser Technology and Engineering Center, Beijing 100094, China;University of Chinese Academy of Sciences, Beijing 100094, China)
出处
《中国激光》
EI
CAS
CSCD
北大核心
2018年第4期99-103,共5页
Chinese Journal of Lasers
基金
国家科技重大专项(2013ZX02202)
