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飞秒激光光镊直写银微纳结构 被引量:12

Direct Writing of Silver Micro-Nanostructures by Femtosecond Laser Tweezer
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摘要 利用800nm飞秒激光光镊捕获了水中分散的银纳米颗粒,在玻璃基片表面直写银线,通过调控激光参数研究了激光功率对银线线宽及表面形貌的影响,实现了线宽为378nm的银线直写。经过测试,直写的银线电阻率为固体银的19.88倍。此外,还利用该方法制备了银二维网格结构,体现了该技术在二维结构直写方面的良好加工能力。 A 800 nm femtosecond laser tweezer can be used to capture the silver nanoparticles dispersed in water and the silver wires are directly written on the glass substrate.The influences of laser power on the silver wire width and surface morphology are investigated by adjusting laser parameters.The direct writing of silver wires with a width of378 nm is realized.After tests,the electrical resistivity of the fabricated silver wire is 19.88 times that of bulk silver.In addition,a two-dimensional(2D)silver grid structure is fabricated by this technique,which manifests that this technique possesses a good process ability in the field of 2D structure direct writing.
作者 陈忠贇 方淦 曹良成 付芸 曹洪忠 姜肇国 段宣明 Chen Zhongyun;Fang Gan;Cao Liangcheng;Fu Yun;Cao Hongzhong;Jiang Zhaoguo;Duan Xuanming(College of Opto-Electronic Engineering, Changchun University of Science and Technology, Changchun, Jilin 130022, China;Chongqing Key Laboratory of Additive Manufacturing Technology and Systems, Chongqing Institute of Green and Intelligent Technology, Chinese Academy of Sciences, Chongqing 400714, China)
出处 《中国激光》 EI CAS CSCD 北大核心 2018年第4期178-183,共6页 Chinese Journal of Lasers
基金 国家自然科学基金(61405196) 中国科学院"西部之光"人才培养计划
关键词 激光技术 激光直写 光镊 飞秒激光 银微纳结构 laser technique laser direct writing laser tweezers femtosecond laser silver micro-nanostructure
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