对称解耦式三自由度并联微动平台的设计

Design of a 3-DOF parallel micro-positioning stage with symmetrical and decoupling structure

为使微定位系统具有较高灵活性,设计了一种三自由度并联微动平台.首先,基于双平行四连杆机构及对称并联结构对台体进行设计,并进一步设计了辅助测量及承载模块;然后制作出微动平台实物,搭建实验系统,对平台位移及位移耦合进行测试.结果表明:在120V的最大驱动电压作用下,平台x、y、θ_z方向的最大位移分别为25.96μm、25.87μm、208μrad;在x和y方向产生的最大耦合位移分别为39.73 nm、140.95 nm,绕z轴产生的最大耦合转角为0.89μrad.

In order to make the micro-positioning system more flexible, a 3-DOF parallel micro-positioning stage is designed. Firstly, the stage is designed based on double parallel four-bar linkage and symmetrical parallel structure, the auxiliary measurement and bearing module is also designed. Then, the micro-positioning stage is fabricated and the experimental system is built to test the displacement and the coupling displacement of the stage. The results show that the maximum displacements of the stage in x, y and θz directions are 25.96 μm, 25.87 μm and 208 μrad respectively under the maximum driving voltage of 120 V, and the maximum coupling displacements in x and y directions are 39.73 nm and 140.95 nm, repsectively, and the maximum coupling angle around the z-axis is 0.89 μrad.