利用飞秒激光双光子技术制备微电极的研究

Research on the microelectrode fabricated by femtosecond laser two-photon polymerization technology

基于飞秒激光双光子聚合微加工技术,利用负光刻胶刻蚀方法制备了内部镂空特殊结构的微电极光刻胶样品,并结合剥离法成功制备了一种镀银的金属微电极,最后利用直通管将微电极进行封装,测试了当直通管填充不同的介质(空气、丙酮、水)时微电极的电容变化值.实验结果表明,所制备微电极样品的电容值与介质的介电常数成正相关,实测值与理论计算值的变化趋势一致.

Based on the femtosecond laser two-photon polymerization technology, a microelectrode photoresist sample with special structure is fabricated using the negative photoresist etching method. A silver-plated metal microelectrode is successfully prepared by adopting the lift-off technique. In the final stage, the microelectrode is encapsulated with the straight tube. The capacitance value of the microelectrode is measured when the straight tube is filled with different media（air, acetone and water）. The experimental results show that the capacitance of the microelectrode sample and the dielectric constant of the medium are correlated, and the measured value is consistent with the theoretically calculated result.