超薄件加工变形误差补偿的研究（英文）

Compensation for Deformation of Turned Ultra-Thin Parts

超薄件可广泛应用于高精度微型器件、光子系统等领域.针对加工后超薄件的较大变形,采用基于超精密车削的误差补偿方法进行研究.提出补偿理论与补偿方法,对原位面形误差与离线面形误差进行测量,利用补偿理论计算得到补偿面形,最后采用三轴伺服控制技术对超薄件变形误差进行车削补偿.补偿加工的超薄铝几何尺寸为Φ20×0.1 mm,一次补偿加工后,工件面形峰谷值由变形产生的误差从15μm降到10μm,具有较好的补偿效果.对补偿中原位测量误差与位置偏移误差进行讨论,提出提高补偿加工精度的方法.

Ultra-thin parts are widely used in various areas such as micro-devices and photonic systems that require high form accuracy. Considering the difficulty in reducing deformation after unloading, this paper presents a method of compensation to machine ultra-thin parts based on ultra-precision turning. To realize this, the compensation theory and methodology of deformation error are put forward. An in situ measurement system is established with a displacement measurement device, and an off-line surface shape is added to the in situ surface figure to achieve final compensation. Then, the three-axis servo con-trol technique is applied to cut the final surface. The compensation experiment is performed on an ultra- thin aluminum alloy part with a diameter of Ф20 mm and a thickness of 0. 1 mm, and the peak-to-valley （PV） value is decreased from 15 μm to 10 μm after one compensation. Two specific errors in compensa-tion, the in situ displacement measurement error and the position deviation error, are discussed to exam-ine the influence of compensation accuracy to achieve a high-quality figure.