柔性SrTiO_3/Ag/SrTiO_3复合结构透明导电薄膜的制备和性能研究

Preparation and Investigation of Flexible SrTiO_3/Ag/SrTiO_3 Multilayer Transparent Conductive Thin Films

为获得高性能的柔性透明导电薄膜,采用磁控溅射技术在柔性PC衬底上制备出了STO(30nm)/Ag/STO(30nm)复合结构透明导电薄膜.分别对不同中间Ag层厚度薄膜的结构、光学和电学性质进行了研究.研究发现:随着中间Ag层厚度的增加,可见光区的平均透过率先增大后减小,电阻率和方块电阻持续减小;当中间Ag层厚度为11nm时,复合结构透明导电薄膜具有最佳的品质因子为14.23×10^(-3)Ω^(-1),此时,其可见光区平均透过率为82%,方块电阻为9.2Ω/sq..

In order to obtain high-performance flexible transparent conductive thin films,STO（30 nm）/Ag/STO（30 nm）multilayer thin films were prepared on PC substrates by magnetron sputtering.The influences of Ag mid-layer thickness on the structure,optical and electrical properties of the multilayer thin films were investigated.As the thickness of Ag mid-layer increases,the average transmittance in visible region firstly increases and then decreases,both the resistivity and sheet resistance decrease.For the multilayer thin films with 11 nm thick Ag mid-layer,it exhibits the maximum figure of merit of 14.23×10^-3Ω^-1 with sheet resistance of 9.2Ω/sq.,and the average transmittance is -82 % in the visible light region.