用于蓝宝石材料加工的新型超精密抛光技术及复合抛光技术研究进展

Research Progress of the Novel Ultra-precision Polishing Techniques and Composite Polishing Techniques for Sapphire Material Processing

超精密抛光是一种降低表面粗糙度,获得高表面质量和表面完整性的加工技术。蓝宝石作为典型的难加工硬脆材料,传统抛光方法存在表面会产生崩碎、划痕等损伤,表面质量难以得到保证以及加工效率低等问题。本文综述了应用于蓝宝石材料的磁流变抛光、水合抛光、化学机械抛光和激光抛光等技术的原理与特点及其研究现状,并分析了各抛光技术的优缺点;从表面质量、磨料与磨液、效率与成本等方面对各抛光技术进行比较;介绍了复合抛光技术在蓝宝石材料中的应用;最后重点展望了蓝宝石材料超精密抛光技术的下一步研究。

Ultra-precision polishing is a process that reduces surface roughness and achieves high surface quality and surface integrity.Sapphire is a typical hard and brittle materials with poor processability,and thereby the traditional polishing techniques are prone to cause damage such as surface fragmentation and surface scratches uncontrollable quality fluctuation,as well as low processing efficiency.This paper summarizes the principles and characteristics and research status of the techniques of magnetorheological polishing,hydration polishing,chemical mechanical polishing and laser polishing which apply to sapphire materials and analyzes the advantages and disadvantages of each polishing technique from the perspectives of surface quality,polishing agent and polishing liquid,efficiency and cost.We also introduce the development of the composite polishing techniques for sapphire material,and outline the future prospect of the ultra-precision polishing techniques for sapphire material.