覆盖阶梯电极的石英晶体圆板高频振动分析

Analysis of high frequency vibrations of quartz crystal circular plate covered by ladder electrode

基于石英晶体圆板厚度剪切振动的位移假设,建立了覆盖阶梯电极的石英晶体圆板厚度剪切振动的频率方程。通过数值求解,获得了覆盖阶梯电极石英晶体圆板中厚度剪切振动的频率解和振动模态分布图。计算结果表明,覆盖阶梯电极的石英晶体圆板存在良好的能陷效应。相比于覆盖均匀电极的情况,覆盖阶梯电极的能陷效应更加明显。

Based on the displacement hypothesis of the thickness-shear vibration of the quartz crystal circular plate, the frequency equation of the thickness-shear vibration of the quartz crystal circular plate covering the ladder electrode has been established. By numerical calculation, the frequency and vibration mode distribution of thickness-shear vibrations in a quartz crystal circular plate covering by ladder electrode have been obtained. The numerical results showed that there is a good energy trapping effect in the quartz crystal circular plate covering the ladder electrode. This effect is more obvious than that of the uniform electrode.