摘要
论述了采用射频磁控溅射技术在316L不锈钢上制备Zr C涂层的技术。通过X射线衍射(XRD)、透射电子显微镜(TEM)、扫描电子显微镜(SEM)、X射线光电子能谱(XPS)等实验,研究了Zr C涂层的物相、微观结构、表面形貌和元素组成等特征;通过纳米压痕、电化学腐蚀和耐磨性等实验,研究了Zr C涂层的硬度、耐腐蚀性和耐磨性。本论文旨在探究C含量对Zr C涂层结构和性能的影响规律。
ZrC coatings were deposited on 316 L stainless steel（316 L SS） by radio-frequency（RF） magnetron sputtering technology in the paper.The phase composition, microstructures, surface topography and elemental composition of ZrC coatings were systematically investigated by X-ray diffraction（XRD）,transmission electron microscope（TEM）, scanning electron microscope（SEM）, X-ray photoelectron spectroscopy（XPS）. The hardness, corrosion resistance and abrasion resistance of Zr C coatings were systematically studied by nanoindentation techniques, electrochemical corrosion technology and abrasion resistance test.The effects of carbon content on the microstructure and properties of ZrC coatings were explored.
作者
邓鹏远
裴迪
温丽超
Deng Pengyuan;Pei Di;Wen Lichao(No.703 Research Institute of CSIC, Harbin 150078, China;Yinchuan Energy Institute,Yinchuan 750105,China;AECC Harbin Bearing Co.,Ltd.,Harbin 150025,China)
出处
《哈尔滨轴承》
2018年第1期48-51,共4页
Journal of Harbin Bearing
关键词
ZrC涂层
316L不锈钢
微观结构
元素组成
硬度
C含量
耐腐蚀性
耐磨性
ZrC coatings
316L SS
micromechanism
elemental composition
hardness
content of C
electrochemical corrosion resistance
abrasive resistance
