PERC电池EL暗片研究
Analysis on EL detect on PERC solar cell black area
摘要
介绍了一种通过调整背钝化工艺改善多晶硅背钝化电池缺陷的方法。采用背钝化新型电池片工艺,在正常生产过程中EL会呈现有规律的区域发暗,严重影响电池片性能。本文通过优化PECVD工艺时间和退火温度,使电池片EL区域发暗得到解决,同时还提升了电池片效率。
出处
《太阳能》
2018年第5期38-40,35,共4页
Solar Energy
参考文献2
-
1孙昀,贾锐,孟彦龙,王仕建,金智,刘新宇.用于高效硅太阳电池的原子层沉积Al_2O_3表面钝化特性研究[J].太阳能,2013(6):38-40. 被引量:3
-
2张鹏,徐征,赵谡玲,田玉华,王庆伟.多晶硅太阳电池预处理及退火工艺研究[J].太阳能学报,2014,35(1):134-138. 被引量:3
二级参考文献9
-
1Hoex B, Schmidt J, Pohl P, et al. Silicon surface passivation by atomic layer deposited AlzO3[J]. Journal of Applied Physics, 2008, 104:044903 - 044903 - 12.
-
2Terlinden N M, Dingemans G, Van de Sanden M C M, et al. Role of field-effect on c-Si surface passivation by ultrathin (2 - 20 nm) atomic layer deposited AI203[J]. Applied Physics Letters, 2010, 96: 112101 - 112101 - 3.
-
3Dingemans G, Terlinden N M, Verheijen M A, et al. Controlling the fixed charge and passivation properties of Si(100)]A]203 inter- faces using ultrathin SiO2 interlayers synthesized by atomic layer deposition[J]. Journal of Applied Physics, 2011, 110:093715-093715 -- 6,.
-
4Saint-Cast P, Benick J, Kania D, et al. High-efficiency c-Si solar ells passivated with ALD and PECVD aluminum oxide[J]. IEEE ilectron Device Letters, 2010, 7(31): 695 - 697.
-
5Benick J, Hoex B, Van de Sanden M C M, et al. High efficiency n type Si solar cells on A1203 passivated boron emitters[J]. Applied Physics Letters, 2008, 92(25): 253504 - 253504 - 3.
-
6Wang J, Mottaghian S S, Baroughi M F. Passivation properties of atomic-layer-deposited hafnium and aluminum oxides on Si surfaces [J]. IEEE Transactions on Electron Devices, 2012, 59:342 - 348.
-
7Yun S J, Lee K-H, Sharp J, et al. Dependence of atomic layer- deposited A1203 films characteristics on growth temperature and AI precursors of AI(CH3)3 and A1C13[J]. Journal of Vacuum Science & Technology A, 1997, 15:2993 - 2997.
-
8Groner M D, Fabreguette F H, Elam J W, et al. Low-temperature AlzO3 atomic layer deposition [J]. Chem. Mater., 2004, 16:639 - 645.
-
9Dingemans G, Einsele F, Beyer W, et al. Influence of annealing and A1203 properties on the hydrogen-induced passivation of the Si/ SiO2 interface[J]. Journal of Applied Physics, 2012, 111:093713 - 093713 - 9.
共引文献4
-
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-
2权微娟,贺海晏,单伟,王仕鹏,黄海燕,陆川.原子层沉积Al_2O_3钝化膜在太阳电池上的应用研究[J].太阳能,2017(6):29-31. 被引量:2
-
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-
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-
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-
2沈燕君,张新然,吴洋,王克威,刘振明,金宏威,张亮仁,张礼和.基于虚拟筛选、分子对接和生物测活的TRPV3选择性小分子拮抗剂的发现[J].药学学报,2018,53(6):966-975. 被引量:1
-
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-
4龚华.55 nm接触孔刻蚀工艺改善[J].集成电路应用,2018,35(6):23-25. 被引量:2
-
5Arielle Tozier de la Poterie,Marie-Ange Baudoin.From Yokohama to Sendai: Approaches to Participation in International Disaster Risk Reduction Frameworks[J].International Journal of Disaster Risk Science,2015,6(2):128-139. 被引量:17
-
6Yan Huang,Zijie Tang,Zhuoxin Liu,Jun Wei,Hong Hu,Chunyi Zhi.Toward Enhancing Wearability and Fashion of Wearable Supercapacitor with Modified Polyurethane Artificial Leather Electrolyte[J].Nano-Micro Letters,2018,10(3):3-10. 被引量:10
-
7马伟,郭明辉,龚新超,李凤龙.射流等离子体处理对热处理材漆膜附着力的影响[J].林业工程学报,2018,3(3):149-154. 被引量:2
-
8杜勇,段志刚,贾耀勤,林志彬,孙亮.深层稠油油藏DC冷采技术研究[J].中国石油和化工标准与质量,2018,38(2):184-186.
-
9姚卫国,鲁姗姗,窦艳丽,管东波,王晓伟.高分子表面金属化技术[J].化工进展,2018,37(5):1852-1859. 被引量:3
-
10孙达威,狄健,宋程成,潘文林.后置导体预热器在超高压XLPE电缆生产中的应用[J].光纤与电缆及其应用技术,2018(3):30-32.