电子洁净厂房中暖通空调的设计

The Design of Heating Ventilation Air Conditioning in Electronic Clean Plant

暖通系统设计的合理性直接影响整个洁净厂房使用,因此要设计好洁净厂房前期必须花费大量时间了解整个生产的工艺流程。文章首先强调了洁净厂房选址及其平面设计一般性要求,叙及了暖通设计需要相互协调配合的若干专业要项,最后以福州某公司集成电路芯片车间为例,详细阐述了该净化车间空调系统设计。

The rationality of the Heating and Ventilation Air Condition（ HVAC） system design directly affects the use of the clean plant.Therefore,adequate time must be spent understanding the entire production process prior to the clean plant design. The article emphasizes the general requirements for the locationand graphic design of the clean plant and outlined several key requirements for the HVAC design that need to be coordinated with each other. Finally,taking the IC chip plant of a company in Fuzhou as an example,the air conditioning system of the purification plant was elaborated in detail.