激光干涉仪在PCB数控机床精度检测中的应用研究

Application Research of Laser Interferometer in Accuracy Detection of PCB NC Machine

激光干涉仪已成为PCB数控机床中测量定位与重复定位精度的标准仪器。针对测量数据不稳定的问题,分析激光干涉仪测量原理,得出测量距离与波长和脉冲数之间的关系;对生产现场环境模块数据进行测量,环境模块变化量对波长总的补偿量为0.23μm,与实际误差相比,波长变化导致的误差几乎可以忽略,通过测量得出测量精度不稳定的主要原因是横梁X轴连接杆的变形。针对该原因进行了结构的重新设计,实现了精度补偿及测量的稳定。

The laser interferometer has become a standard instrument in measuring the positioning accuracy and resetting accuracy of PCB NC machine. Aiming at the measuring data instability about positioning and repositioning precision,the measurement principle of the laser interferometer was studied,the relationship between the measurement distance and the wavelength and pulse number was obtained. The environment module data in production field were measured,the total compensation of wavelength variation was 0. 23μm,so the deviation caused by wavelength variation was almost negligible compared with the actual error. The main reason for the instability of measurement accuracy was the deformation of X axis joining pole. The structure of the X axis joining pole was redesigned.The stability of the accuracy compensation and measurement was achieved.