Nd:YAG脉冲激光清洗技术研究

Research on Nd:YAG Pulse Laser Cleaning Technology

激光清洗技术是近10年来发展的一种新型清洗技术,它以自身的优势在许多领域中逐步取代了传统清洗工艺。脉冲式的Nd:YAG激光清洗的过程依赖于激光器所产生的光脉冲的特性,基于由高强度的光束、短脉冲激光及污染层之间的相互作用所导致的光物理反应,介绍了Nd:YAG激光器的基本原理及分类,着重对激光清洗原理进行了分析。还介绍了用Nd:YAG激光器进行的清洗实验。结果表明,用Nd:YAG激光器清洗光滑基底表面污粒具有很好的效果,是今后清洗技术发展的一个方向。

Laser cleaning technology is a new rapidly developing cleaning technology in recent ten years.With its advantages, it has gradually replaced traditional cleaning technologies in many fields. The pulsed Nd：YAG laser cleaning process depends on laser pulse characteristics generated by lasers. Based on the photophysical reaction caused by the interaction among high intensity beam, short pulse laser and pollution layers, the basic principle and classification of Nd：YAG laser are introduced, and the principle of laser cleaning is imposed. The Nd：YAG laser cleaning experiment is also introduced. Experimental results show that Nd：YAG laser cleaning has good effect on cleaning the surface of smooth substrate, which is a developing direction of cleaning technology in the future.