摘要
提出了以飞秒激光为光源,配合高精度的放大及光路、微加工数控系统,搭建了数控微纳加工及公共服务平台,探索了平台组建及加工应用中的关键技术问题,在玻璃、玉石等材料的实际微纳加工中取得了良好的应用效果。
The NC micro-nano processing platform is put forward, which took the femtosecond laser as the light source. The high precision amplification-optical system is coordinated with micro machining system. The key technical problems for processing platform building and the machining application are explored. Good results of the micro-nano processing are achieved in the actual glass, jade and other materials.
作者
宋一然
陈庆堂
林振衡
唐群华
林昌
王富铮
SONG Yiran;CHEN Qingtang＊;LIN Zhenheng;TANG Qunhua;LIN Chang;WANG Fuzheng(School of Mechanical and Electrical Engineering, Putian University, Putian Fujian 351100, China)
出处
《莆田学院学报》
2018年第2期48-51,共4页
Journal of putian University
基金
福建省高校产学研科技项目(2014H6021)
莆田市科技项目(2015G2013)
福建省激光精密加工工程技术中心
现代光学测量与激光无损检测福建省高校重点实验室开放课题(2016JZA010)
关键词
飞秒激光
数控
微纳加工
关键技术
femtosecond laser
NC
micro-nano machining
key technology
