摘要
对生产多晶硅的主要生产方法进行了比较,指出改良西门子法、流化床法、冶金法这3种工艺的优点和不足。重点介绍了多晶硅主流生产方法改良西门子法,阐述了改良西门子法生产多晶硅还原过程的反应机理、数值模拟等,并对该工艺目前的研究进展进行了阐述。
The main polysilicon production methods are compared each other.The advantages and disadvantages of the modified Siemens method,the fluidized bed method and the metallurgical method are pointed out. The research progress and existing problems for the process of the modified Siemens method that is the mainstream polysilicon production method at present are introduced emphatically,mainly from the aspects of reaction mechanism,numerical simulation and process flow,etc.
作者
李亚广
聂陟枫
周扬民
方文宝
谢刚
侯彦青
LI Ya-guang;NIE Zhi-feng;ZHOU Yang-min;FANG Wen-bao;XIE Gang;HOU Yan-qing(State Key Laboratory for Clean Utilization of Complex Nonferrous Metal Resources, Kunming University of Science and Technology, Kunming 650093, China;Facuhy of Metallurgical and Energy Engineering, Kunming University of Science and Technology, Kunming 650093, China;Kunming Metallurgical Research Institute, Kunming 650093, China)
出处
《现代化工》
CAS
CSCD
北大核心
2018年第5期38-42,共5页
Modern Chemical Industry
基金
国家自然科学基金项目(21566015)
云南省应用基础研究项目(2015FB126)
关键词
多晶硅
改良西门子法
数值模拟
研究现状
polysilicon
modified Siemens method
numerical simulation
research status
