基于机器视觉的微电极自动测量技术

Research on automatic detection of microelectrode based on machine vision technology

基于数字图像处理技术和MATLAB软件设计了微电极自动测量系统。对采集到的电极图片进行图像预处理、图像分割及尺寸测量。测量用电化学腐蚀制备的微电极,结果表明系统可以测量圆柱型与球头型两种电极的直径尺寸以及同轴度误差,系统测量尺寸值与显微镜下人工检测的尺寸值相对误差在4%以内,表明该系统有测量精度高、检测速度快等特点,能够满足微电极尺寸测量的要求。

In this paper,the automatic detection system of microelectrode is designed based on MATLAB including image processing,image segmentation and dimension detection. The electrode prepared by electrochemical corrosion test was carried out. The experimental results of electrode prepared by electrochemical corrosion test show that the system can measure the diameter,size and coaxiality error of two kinds of electrodes,cylindrical and spherical,the relative error of the size measured by the system and the size of the manual inspection under microscope is less than 4%.