“探测器级”单晶金刚石材料生长技术研究进展

Research Advances on Growth Technique of “Detector Grade” High-Quality Single Diamond

为了获得高性能单晶金刚石探测器,综述了一种制备高质量单晶金刚石的方法。在制备过程中,尝试使用了Lift-off剥离技术,使衬底可重复利用,大大降低了金刚石材料的成本。研究表明,通过该方法制备的金刚石材料质量优于商用"电子器件级"金刚石;利用该类材料制作的金刚石探测器性能优异:对14 Me V中子和5.486 Me Vα粒子的能量分辨率分别达到1.5%和0.3%,电荷收集效率接近100%。

In order to obtain high-performance diamond detector,an effective method of growing highquality single crystal diamond material is overviewed. On the process of preparation,cost reduction can be attained by reusing the HPHT single diamond substrate using lift-off method. As a result,‘detector grade＇CVD diamond films have better crystalline quality than commercial ‘electronics grade＇diamond films. Radiation detectors based on this diamond material show high performance： energy resolution of1. 5% for 14 Me V neutron and 0. 3% for 5. 486 Me V alpha particles,charge collection efficiency of approximately 100%.