硅基光电子集成光控相控阵的研究进展

Silicon-Based Optoelectronic Integrated Optical Phased Array

光控相控阵(OPA)不需要机械转动即可实现光束在空间内的扫描,在激光测距以及自由空间光通信等领域具有广阔的应用前景。硅基光电子集成技术可在芯片上实现光电子器件的大规模集成,并与互补金属氧化物半导体(CMOS)集成电路工艺技术完全兼容,以其制作的光控相控阵具有扫描速度快、体积小、成本低、功耗低等特点。目前报道的利用硅基光电子集成技术制作的相控阵,最大的横向扫描范围为80°,最大的纵向扫描范围为36°。简述了硅基光电子集成相控阵的扫描原理,并对国内外最新的研究成果进行了分析总结,最后指出此种技术实用化过程中亟待解决的关键问题,并提出了一些可以提升性能的方案。

Optical phased array （OPA） can realize beam scanning in space with no need of mechanical rotating. It has a universal application prospect in many fields, such as laser ranging and free-space optical communications. Silicon-based optoelectronic integration technology can integrate large scale optical devices on the chip and fully compatible with CMOS integrated circuit technology. OPA based on this technology has the characteristics of fast scanning speed, small volume, low＇cost and low po＂arer consumption. At present, the maximum of scan range of OPA fabricated by silicon-based optoelectronic integration technology is 80~ in horizontal direction and 36~ in vertical direction. We briefly introduce the scanning principle of OPA. The newest research results at home and abroad are summarized and analyzed. Finally, the key issues that need to be solved are discussed and some solutions to improve performance are proposed.