显微热成像系统微扫描误差修正技术

Micro-Scanning Error Correction Technique for Microscope Thermal Imaging System

显微热成像系统可对物体细微温度分布进行显微检测。研制了光学微扫描显微热成像系统,但机械振动、机械加工等产生的误差会导致微扫描系统产生误差,由微扫描系统采集的4幅低分辨率图像的微位移位置不是标准的正方形,使得由这些带有误差的图像直接插值得到的图像重建质量下降,因此需降低微扫描系统的误差。基于微扫描原理和图像插值方法,提出一种由非标准2×2微扫描图像获得标准2×2微扫描图像的微扫描误差修正方法。仿真和实验结果表明,所提方法能有效减小微扫描误差,进而提高光学微扫描显微热成像系统的空间分辨率。所提方法还可以应用到其他光电成像系统中,以提高系统空间分辨率。

A microscope thermal imaging system can be used for microscopic observation of the temperature distribution of an object. We develop an optical micro-scanning microscope thermal imaging system, but there is micro-scanning system error caused by mechanical vibration and machining error, so the micro displacement position of the four low-resolution images collected by the micro-scanning system is not standard square. The quality of reconstructed image obtained by the direct interpolation for these erroneous images is reduced, so the error of micro- scanning system should be reduced. Based on the micro-scanning principle and image interpolation method, we propose a micro-scanning error correction technique to obtain standard 2 × 2 micro scanning images from nonstandard 2 × 2 micro-scanning images. The simulation and experimental results show that the proposed technique can effectively reduce micro-scanning error and improve the spatial resolution of optical micro-scanning microscope thermal imaging system. The proposed technique can also be applied to other photoclcctric imaging systems to improve the spatial resolution of system.