基于柔性微电极的高灵敏度MEMS电化学地震检波器

High sensitivity MEMS electrochemical seismic sensor based on flexible microelectrodes

为了进一步降低微机电系统(MEMS)电化学地震检波器敏感电极的加工成本,提升传感器的灵敏度,推动其在地球物理勘探等领域的发展,提出了一种基于柔性微电极结构的新型MEMS电化学地震检波器。与基于硅衬底制作敏感电极相比,敏感电极的制作方法可以通过有效减小电极间距,大幅度提升传感器的灵敏度,大幅降低工艺成本。介绍了柔性微电极的加工工艺流程,并对传感器的性能进行了测试。结果表明:提出的地震检波器较基于硅衬底微电极器件灵敏度提高了一个数量级。

In order to further decrease cost of sensing electrodes of electrochemical seismometer,and increase its sensitivity, promoting its development in the field of geophysical exploration, a MEMS-based electrochemical seismic sensor based on flexible microelectrodes is presented. Compared with silicon-based fabrication process, the proposed fabrication process of the microelectrodes can effectively decrease the cost and reduce intervals between the electrodes, leading to a significantly increase in the sensitivity of the device. Fabrication process of the proposed flexible microelectrodes is introduced and the performance of the proposed device is test. Test result demonstrates that the sensitivity is one order higher than that of silicon-based counterpart.