多晶硅锭的剖方质量改善研究

Study on the Improvement of Square Sectionquality of Polycrystalline Silicon Ingot

从改善砂浆切割性能出发,研究了砂浆物理性质、剖方后小方棒尺寸及线痕比例随着切割刀数的变化趋势,分析了相关原因,最终得到多晶硅锭剖方的工艺方法,即:砂浆更换方式采用整缸更换,并且切割工艺采用变速切割;增大砂浆流量;采用改善办法可以有效提高好砂浆的切割能力,得到更好的切割效果。

This paper starts with improving the cutting performance of slurry,it researches the variation tendency of the physical property of slurry,the dimensions of the square rod after cutting,and stria ratio as the number of cutting increases,and analyses its reason. Finally,we get the method of improving the cutting effect of polysilicon ingot： the slurry replacement method adopts the replacement of the whole cylinder,we use variable speed cutting and increase the flow of slurry as cutting technology. The cutting ability of slurry can be effectively improved by using this improved method,we get the better cutting effect.