天车系统关键技术研究

Research on Key Techniques of Crane System

天车系统作为一种稳定可靠的物料搬运系统,广泛应用于集成电路产业的自动物料搬运系统。介绍了天车系统的关键技术,包括吊运车技术、吊运车轨道技术、供电技术、精密运动控制技术和污染颗粒的防护技术。

As a stable and reliable material handling system, the Overhead Transfer system is widely used in the automatic material handling system in IC industry. This article describes the key technologies of the Overhead Transfer system, including trolley technology, trolley rail technology,power supply technology, precision motion control technology, and pollution particle protection technology.