基于湿式清洗机的搬运机械臂精度设计

Accuracy Design of Transferring Robot's for Wet-bench

湿式清洗机是集成电路制造的关键装备,具有强腐蚀性的内部作业环境、运行性能要求高等特点,这对其搬运系统的设计提出了较高的要求。根据湿式清洗机和直角坐标式机械臂的特点,提出了基于丝杠和齿轮齿条为驱动结构的机械臂精度设计方案;对机械臂上主要机械部件的规格和安装调试方案进行了详细设计;使用了模块化的安装基板在4 m以上的行程情况下实现了较高的行走精度。通过在无尘室内的安装调试,验证了该精度设计方案的可行性。

Wet-bench is a critical equipment in SEMI industry,with corrosive internal environment,high performance requirements and so on,which puts forward a higher demand on the design of its transferring system. Based on the layout of wet-bench and mechanical characteristic of cartesian robot,this paper puts forward the overall accuracy design of robot system based on rack ball screw components; and detailed design of specification and installation plan for major mechanical component. By using the modularized mounting base plate,the robot can realize a higher accuracy over 4 meters moving range. With tested by commissioning experiment in clean room,the feasibility of such kind of accuracy design is verified.