一种氨基吡啶铈(Ⅲ)配合物的合成及其应用研究

Synthesis and Application of an Aminopyridinato Ce(Ⅲ) Compound

合成了氨基吡啶铈(Ⅲ)配合物并通过核磁和元素分析对其进行了表征;通过热重分析(TGA)对其热稳定性,挥发性和蒸汽压等热性质进行了研究,以期适用于化学气相沉积(CVD)技术的应用。最后,通过热型CVD技术制备出了Ce O2薄膜,表明氨基吡啶铈(Ⅲ)配合物可以作为一种新型的CVD前驱体。

The aminopyridinato Ce（Ⅲ） compound were synthesized and characterized by NMR and elemental analysis. Thermal properties such as thermal stability, volatility and vapor pressure were studied by thermogravimetric analysis（TGA） in order to be applicable to application of chemical vapor deposition（CVD） technology. Finally, a Ce O2 thin film was prepared by thermal CVD technique, indicating that the aminopyridinato Ce（Ⅲ） compound can be used as a novel CVD precursor.