光学自由曲面机床检测系统静态几何误差快速辨识方法研究

Swift Identification Method for Identifying Static Geometric Errors of Ultraprecision Machine Tool

本文以光学自由曲面加工机床为研究载体,实现了机床检测系统的静态几何误差的快速辨识。通过多体运动学理论建立了机床几何误差模型,从而提取出影响检测系统精度的13项静态几何误差。并在此基础上,类比球杆仪工作原理,设计了针对该系统静态几何误差辨识的特征样件,并基于该样件完成了误差辨识算法的研究。最终通过模型仿真与初步实验验证了该算法的可行性。

Based on the optical freeform surface machine tool, the static geometric error of the machine tool detection system is identified. These 13 static geometric errors are extracted with the geometric error model of the machine tool established by the multi-body kinematics theory. On this basis, a feature sample for static geometric error identification of the machine tool is designed, and the research of error identification algorithm is completed based on this prototype. The feasibility of the algorithm is verified by model simulation and preliminary experiments.