多芯光纤端面耦合微纳波导有机气体传感器

Multicore optical fiber coupled micro-and nano-waveguide for sensing of volatile organic compounds

以多芯光纤端面为平台,在其上设计并采用双光子三维激光直写技术制备了由微柱、微棱镜、微椎体及微纳波导组成的光刻胶光路系统。实验研究了不同截面尺寸微纳波导对乙醇蒸气的光学传感响应特性。在波导截面尺寸优化后,获得标准大气压下,22℃的饱和乙醇蒸气的时间响应为1.54nm/s,最低的乙醇蒸气探测浓度为27.3g/m3,最高乙醇浓度变化响应的灵敏度为3.7×10-13 m/(g·m-3)。该器件具备小型化、远程化及操作简便等优点,有望应用于空间狭小、被检测物难以接触的环境。

Taking the end facet of a multicore optical fiber as a platform,an optical system is designed and fabricated by using three dimensional two-photon lithography technology,which is consists of micro-pillars,prisms,tapers,micro-and nanowaveguide,and connects two cores of the multicore optical fiber.The response properties of this system to the vapor of ethanol are investigated experimentally.With the optimized geometrical parameters of the micro-and nano-waveguide,the time response to the vapor of ethanol is 1.54 nm/s,the lowest detectable concentration is 27.3 g/m3,and the response sensitivity of the system to the change of the vapor concentration is 3.7×10-13 m/（g·m-3）,under standard atmospheric pressure and room temperature of 22 ℃.This device with advantages of miniaturization,remote sensing and easy-to-use,could be applied in the situation with limited space.