摘要
电容式微超声换能器(CMUT)作为一种新型的MEMS器件,在空气耦合无损检测领域具有较大的研究价值;设计了一种在空气介质中使用的电容式微超声换能器阵列,阵列由8个阵元组成,每个阵元包含16个CMUT敏感单元;介绍了CMUT换能器的原理和设计方法,利用FieldⅡ仿真了不同参数下的阵列指向性;对加工出的CMUT阵列进行了表面形貌测试和声学实验测试。实验结果表明:所加工的CMUT阵列满足设计要求,实验结果同仿真结果一致。
Capacitive micromachined ultrasonic transducer（ CMUT） as a new type of MEMS device has great research value in the field of air coupled nondestructive testing. An Air-Coupled Capacitive Micromachined Ultrasonic Transducer（ CMUT） array was designed. The array is composed of 8 elements. Each element contains 16 CMUT sensitive cells. The principle and design method of CMUT transducer were introduced. The directivity of the array was analyzed in different parameters with the aid of the Field Ⅱ. The surface morphology of CMUT array was tested. An acoustic test about the directivity of the array was designed. The experiment showed that CMUT array met the design requirements,and the results were consistent with the simulation results.
作者
张慧
郑冠儒
李志
曾周末
ZHANG Hui;ZHENG Guanru;LI Zhi;ZENG Zhoumo(State Key Laboratory of Precision Measurement Technology and Instrument,Tianjin University,Tianjin 300072,Chin)
出处
《传感技术学报》
CAS
CSCD
北大核心
2018年第5期803-808,共6页
Chinese Journal of Sensors and Actuators
基金
国家自然科学基金项目(61771337)
关键词
电容式微加工超声换能器
空气耦合
相控阵
声学测试
capacitive micromachined ultrasonic transducer
air-coupled
phased array
acoustic test
