坐标测量机精度校准方法的分析与比较

Analysis and comparison of calibration methods for coordinate measuring machines

坐标测量机的精度是衡量其性能的重要指标,综合反映了测量结果的准确性,是广大用户选用坐标测量机的重要参考因素。文章主要对坐标测量机不同的精度校准方法展开研究,介绍了国内外现行标准和规范规定的校准方法,并对国外发达国家所采用的坐标测量机精度校准方法进行了归纳和总结,系统给出了量块校准方法、激光干涉仪校准方法、空间球板校准方法3种坐标测量机的精度校准方法,对上述3种校准方法进行了比较,归纳出各自的优缺点。

The accuracy of CMM is an important indicator of its performance,a comprehensive reflection of the accuracy of the measurement results,a key consideration factor of users to select the type of CMM.The majority of users choose the CMM by considering this key factor.In this paper,the calibration method of coordinate measuring machine is studied.The paper introduces the current domestic standards and calibration norms and the standards for accuracy evaluation of CMM used by some foreign industrial countries,understand the necessity for calibration of CMM.And the specific precision calibration methods of the CMM,such as the gauge block calibration method,the laser interferometer calibration method and the space ball plate calibration method,are given to compare and summarize the advantages and disadvantages.