复合磁控溅射Zr-B-N涂层微结构的控制及性能研究

Synthesis and Troblogical Properties of Zr-B-N Coatings by High Power Impulse and Pulsed DC Magnetron Sputtering

采用高功率脉冲和脉冲直流复合磁控溅射技术,通过改变Zr B2靶溅射功率来调节Zr-B-N涂层的成分和微结构,系统研究了Zr B2靶功率对涂层成分、微观结构和性能的影响。研究结果表明:随着Zr B2靶功率的增加,Zr-B-N涂层形成了以非晶a-BN包裹着纳米晶的纳米复合结构;涂层的硬度由36.76下降到16.1 GPa;当Zr B2靶溅射功率为0.4和0.6 k W时,表征膜/基结合强度的临界载荷分别达到最小值29.28和最大值43.85 N。摩擦系数和磨损率具有相同的变化趋势,均随Zr B2靶溅射功率的增加先增大后减小,当Zr B2靶溅射功率为0.8 k W时,Zr-B-N涂层摩擦系数较低,抗磨损能力亦最强。

The Zr-B-N nanocomposite coatings were synthesized by high power impulse magnetron sputtering combined with pulsed DC magnetron sputtering. The influence of the Zr B2 target power on the microstructures,interfacial adhesion and tribological properties was investigated with X-ray diffraction,X-ray photoelectron spectroscopy,scanning electron microscopy,energy dispersive spectroscopy,transmission electron microscopy and conventional mechanical probes. The results show that the target power has a major impact. To be specific,the coatings comprised the nano-particles embedded in amorphous a-BN; as the power increased,the hardness decreased rapidly from36. 76 GPa to a constant about 16. 1 GPa; the interfacial adhesion fluctuated,with valleys and peaks of 29. 28 and43. 85 N,respectively; the average friction coefficient and wear-rate changed in an increase-decrease mode,in 0. 4- 0. 6 k W range. Deposited at 0. 8 k W,the Zr-B-N coating displayed the lowest friction-coefficient and strongest wear-resistance.