摘要
为了满足工程领域对高可靠传感器的实际需求,提出了高可靠性压力传感器的设计方法,该设计方法包括敏感元件设计、整机结构设计和电路设计。敏感元件芯片为SOI芯片,结构为隔离密封结构,装配工艺成熟可靠;敏感元件通过电子束焊接技术固定连接,传感器密封强度大;电路设计采用基于MAX1452的温度补偿方法,输出温度漂移小。最后,传感器通过性能测试以及环境试验的考核,试验结果表明采用该方法设计的传感器能够满足实际使用要求。传感器在150℃下零点温度漂移和灵敏度温度漂移均小于±0.1%/℃。
To meet the practical requirements of the high reliable sensor in engineering field,the design method of high reliable pressure sensor is proposed.The design method includes sensing element design,structural design and circuit design.The chip of the sensing element is SOI chip,which structure is isolated and the assembly process is mature and reliable;the sensing element is fixed and connected by electron beam welding technology,so the sealing structure is very strong;the circuit design is based on the temperature compensation method with MAX1452,so the temperature drift is small.Finally,the sensor was verified by performance test and environmental test,which results show that the sensor designed by this method can meet practical requirements.The sensor＇s zero temperature drift and sensitivity temperature drift are less than ±0.1%/℃ at 150 ℃
作者
张艳华
陈玉玲
史岩峰
王强
Zhang Yanhua;Chen Yuling;Shi Yanfeng;Wang Qiang(Beijing Institute of Structure and Environment Engineering, Beijing 100076, China)
出处
《电子测量技术》
2018年第1期109-113,共5页
Electronic Measurement Technology
关键词
高可靠性
压力传感器
SOI
温度补偿
环境试验
high reliability
pressure sensor
SOI
temperature compensation
environmental test
