摘要
通过JJG 101-2004《接触式干涉仪》和JJG146-2011《量块》检定规程,本文探讨了接触式干涉仪工作台平面度在量块长度测量中的引入误差,结果显示使用接触式干涉检定量块长度时,在极端条件下,工作台平面度引入的误差较大,可能会影响量块的合格评定。
The paper makes the discussion on introduced error of flatness of working platen of Contact Interferometer to the length of gauge block based to JJG 101-2004 and JJG146-2011. The result shows the introduced error is relatively big under extreme conditions and thus possibly affects the conformity appraisal of gauge blocks.
出处
《计量与测试技术》
2018年第6期118-119,122,共3页
Metrology & Measurement Technique
关键词
量块长度
检定
接触式干涉仪
平面度
误差
length of gauge block
calibration
contact interferometer
flatness
error
