摘要
相比于其他类型的无线传感器,无线声表面波传感器能解决恶劣环境(如高温)下的探测问题。基于目前的声表面波传感器,阐述了声表面波技术的发展、工作模式和原理;结合当前声表面波在高温领域应用的研究状况,详细阐述了声表面波传感器在高温应用领域需要解决的问题以及适用于高温领域的声表面波传感器的材料;对声表面波传感器在高温领域中的应用和发展进行了总结和展望。
Surface acoustic wave( SAW) sensors can work under harsh environment,such as high temperature compared with other types of sensors. Based on current developed SAW sensors,the development,operation mode and principle of SAW technology are reviewed in details. Combined with recent researches and material property concerning the field of high temperature applications is also discussed. Outlook of this field is briefly summarized and prospected.
作者
潘小山
杨璐羽
王琴
李功燕
PAN Xiao-shan;YANG Lu-yu;WANG Qin;LI Gong-yan(Institute of Mieroeleetronies, Chinese Academy of Sciences, Beijing 100029, China;State Grid Liaoning Electric Power Research Institute,Shenyang 110006 ,China)
出处
《传感器与微系统》
CSCD
2018年第6期1-4,7,共5页
Transducer and Microsystem Technologies
基金
国家电网公司科技项目(新型测温传感关键技术研究及应用)
关键词
声表面波传感器
高温
材料
surface acoustic wave (SAW) sensor
high temperature
material